OPTX™ Reflectometers
OPTX™ reflectometers are an accurate and affordable solution for routine measurement of thin film thickness and refractive index. Each instrument combines a fixed-grating CCD spectrophotometer with our intuitive, high-performance material modeling software to make daily measurement tasks fast, reliable and simple.
OPTX™ reflectometers are available in three configurations to meet your specific application needs.
OPTX-R
Our base model, which allows for rapid, accurate, and intuitive measurement capabilities for most thin film measurement applications.
OPTX-RT
Adds transmission measurement capabilities, and excels in analysis of both transparent and non-transparent substrates.
OPTX-RM
Adds a microscope base with a manual stage and multiple objectives for applications requiring a small spot size. An optional CCD camera is available for displaying the measurement location on the computer monitor.
A UV option is available for OPTX-R and OPTX-RT models.
| OPTX-R / RT | OPTX-R / RT UV | OPTX-RM | |
|---|---|---|---|
| Film thickness range: | 10nm-100μm | 5nm-100μm | 10nm-200μm |
| Film thickness accuracy: | ± 2Å for NIST traceable standard oxide 1000Å to 1μm | ± 1.5Å for NIST traceable standard oxide 1000Å to 1μm | ± 2Å for NIST traceable standard oxide 1000Å to 1μm |
| Spectral range: | 380nm-1000nm | 220nm-1000nm | 380nm-1000nm |
| Spot size: | 2mm | 2mm | 60μm (4x objective) 24μm (10x objective) 12μm (20x objective) |
| Sample size: | 2mm to 200mm | 2mm to 200mm | 2mm to 300mm |
| Spectral resolution: | 0.30nm | 0.47nm | 0.30nm |
| Light source: | Regulated halogen lamp (10,000 hrs lifetime) | Regulated deuterium-halogen lamp (2,000 hrs lifetime) | Regulated halogen lamp (1,000 hrs lifetime) |
| Detector type: | 2048 pixel Sony linear CCD array | 2048 pixel Sony linear CCD array | 2048 pixel Sony linear CCD array |
| Measurement time: | < 1 sec | < 1 sec | < 1 sec |